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30 years of experience. 
30 years of highest quality. 
30 years FHR Anlagenbau GmbH.

In 1991, a single 6-inch wafer sputtering tool began our journey into vacuum deposition technologies.

FHR.Star series remains the cornerstone of our wafer-based product portfolio, expanded 30 years later to include:


  • FHR.Boxx series for medium productivity deposition on flat or 3D substrates
  • FHR.Line series for horizontal or vertical high-volume production on large areas
  • FHR.Roll series for deposition of functional layers onto flexible substrates

Complementary vacuum technologies offered through FHR include EvaporationPECVD and Atomic Layer Deposition.























About FHR Anlagenbau GmbH

FHR Anlagenbau GmbH is specialised in the development of innovative thin-film coating technologies and vacuum coating equipment and renders various services in the field of thin-film technology. The major field of business is the construction of coating plants which feature a range of vapour deposition, magnetron sputtering, CVD and ALD technologies for industrial production and research applications. These systems are used in many branches of industry, including photovoltaics, in particular for CIGS solar cells and organic PV cells, solar thermal plants, optics, electronics, sensor technology, and in the automotive sector.

The product portfolio includes modular cluster systems for stationary coating of substrates, inline systems with vertical or horizontal substrate transport for coating glass plates or tube surfaces, as well as roll-to-roll plants for coating flexible substrates such as metal strips or polymer films. FHR closely collaborates with renowned research institutions and industry partners world-wide. The company takes a leading market position, in particular in the field of roll-to-roll vacuum coating equipment. In addition to plant engineering, FHR manufactures planar and tubular sputtering targets and has a powerful service department.