Press releases

Spatial atomic layer depos­ition system - FHR.Star.400x300-SALD

Spa­tial ALD allows for high speed and highly con­formal coat­ings on flat as well as micro-struc­tured sur­faces. Applic­a­tions are dielec­tric lay­ers for anti-reflect­ive coat­ings on lenses as well as coat­ings for elec­trical insu­la­tion or pro­tec­tion against mois­ture or oxy­gen applied to energy sys­tems, med­ical devices or func­tion­al­ized tex­tiles.

In its base con­fig­ur­a­tion, the FHR.Star.400x300-SALD is made for thermal ALD on up to eight wafers or four 3D sub­strates in par­al­lel. For Al2O3 on wafers, depos­ition rates of 5-10 nm/​min and thick­ness non-uni­form­it­ies <± 2.0% have been reached.

A large blind flange allows to add other thin film tech­no­lo­gies or plasma treat­ment and the machine is already pre­pared to for in-situ ellip­so­metry and trans­mis­sion spec­tro­scopy for improved pro­cess con­trol. To fur­ther increase the pro­ductiv­ity, the FHR.Star.400x300-SALD can be included in a cluster setup with a cent­ral hand­ling robot cham­ber, load locks, pre-treat­ment cham­bers or other pro­cess cham­bers.



































About FHR Anlagenbau GmbH

FHR Anlagenbau GmbH is specialised in the development of innovative thin-film coating technologies and vacuum coating equipment and renders various services in the field of thin-film technology. The major field of business is the construction of coating plants which feature a range of vapour deposition, magnetron sputtering, CVD and ALD technologies for industrial production and research applications. These systems are used in many branches of industry, including photovoltaics, in particular for CIGS solar cells and organic PV cells, solar thermal plants, optics, electronics, sensor technology, and in the automotive sector.

The product portfolio includes modular cluster systems for stationary coating of substrates, inline systems with vertical or horizontal substrate transport for coating glass plates or tube surfaces, as well as roll-to-roll plants for coating flexible substrates such as metal strips or polymer films. FHR closely collaborates with renowned research institutions and industry partners world-wide. The company takes a leading market position, in particular in the field of roll-to-roll vacuum coating equipment. In addition to plant engineering, FHR manufactures planar and tubular sputtering targets and has a powerful service department.