FHR.Line product series

Industrial manufacturing lines, highly productive pilot lines or research and development systems

  • Uni- or bi-directional (oscillating) substrate transport 
  • Simultaneous coating of the front and back possible   
  • Various process technologies can be integrated   
  • Vertical and horizontal designs are available

Inline vacuum coating systems with PVD and PECVD technologies

Our inline concepts

Inline concepts are the right answer for high production magnetron sputtering, thermal evaporation or PECVD coating particularly for rigid substrates. We offer vacuum coating solutions designed and customized to your particular substrate size and coating requirements in either horizontal or vertical configuration. We can integrate pre-treatment processes by heating or etching the substrates as well as a fully automatic loading/unloading system on a customer-specific basis. Inline systems have a wide range of applications, whether it be as a high-production, continuous flow system with continuous product output or as a pendulum system being highly flexible regarding the product due to exchangeable targets.

Combinable process technologies

The following technologies can be implemented into our inline systems in accordance to the specific requirements of the customers' applications. 

  • Magnetron sputtering   
  • Thermal evaporation  
  • Plasma Enhanced Chemical Vapour Deposition (PECVD)   
  • Plasma Etching (PE) / Reactive Ion Etching (RIE)
  • Heat treatment

A quick look at the advantages for you

The FHR.Line product series provide our customers with high-quality coating machines that combine a wide variety of characteristics and advantages.

  • Attractive investment and operating costs   
  • Fully automatic loading and unloading   
  • Double-sided coating is possible   
  • Use of FHR's proprietary sputtering technology   
  • Fewer resources needed to modify or expand the system thanks to the modular design
  • Closed secondary cooling circuit possible   
  • Fully automatic process control   
  • High productivity


Fully automatic vertical inline systems for deposition of functional films

  • Fully automatic loading and unloading of substrates
  • Rear handling without front-side contact
  • Fully automatic process control

Galery of FHR.Line projects

Contact Sales Inline Systems

Daniel Oelsner
Senior Sales Manager

+49 35205 520-277 sales[at]fhr.de