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Customized Coating Systems


You have an application – we have the right system.Together, we develop a coating solution to meet your requirements.

Thin Film Technology for Research & Industry


In recent years, vacuum coating technology has established itself as a key technology in numerous industries, whether in semiconductor production, optics, or the energy sector. FHR Anlagenbau GmbH specializes in developing and manufacturing tailor-made vacuum coating machines in special system engineering to meet our customers' unique requirements.

The Thin Film Company – that’s us. This statement is both a vision and a claim. 

FHR – Your Expert for Vacuum Systems


We are an international team of roughly 200 engineers, mechatronics engineers, physicists, technicians, chemists, commercial experts and materials scientists. We work together to offer you the best functional coating for your application.

Our corporate culture is characterized by a spirit of trust, innovation, a sense of responsibility and honesty.

We have grown steadily over more than 30 years. Our customer base includes well-known volume producers, as well as small and medium-sized hidden champions. Researchers and developers from industry and academia rely on our innovative spirit and expertise in the discipline of functional coatings in the very early development phases of their products and processes. We regularly set ourselves new challenges. 

We Are Your Experts

Our Services For You

Planning & Development

From the initial idea to the finished system – we develop customized vacuum coating systems for you. 


For optimum productivity, all components must work together perfectly: Greater throughput with integrated robot technology. 

Vacuum Coating Systems

Our five product ranges cover a wide variety of applications. Discover our vacuum coating systems. 

Sputtering Targets & Bond Service

We develop and manufacture top-quality sputtering targets – including optional bonding service. Both in large series and individual pieces. 

Coating Service

Be it as a sample or in small series: Take advantage of our in-house coating service. 

Customer Service

From technical support to machine implementation and training. Discover our comprehensive customer service. 


Whether you need a vacuum coating system, sputtering target, coating service or technical support – our team is on hand to help you. Simply make an inquiry now!

Our Profile


Our roots lie in special system engineering. The 300+ systems we have delivered to date enable us to draw on a large number of modular assemblies that have been tried and tested in practice. On the one hand, we have established ourselves as experts when it comes to translating unique requirements into robust production systems and processes. On the other hand, we develop series systems tailored to applications, take on the pre-series qualification for you, or work with you to develop material compositions for the consumables (targets) used in our systems that are specially tailored to your requirements. Service and consulting are a matter of course for us, and complete our portfolio.

Every day, our customers use our functional coatings to manufacture products in a wide range of markets, such as electronics, MEMS and sensor technology, precision optics and displays, solar thermal energy and photovoltaics.

Our customers order highly flexible cluster systems (FHR.Star, primarily for coating wafer-based substrates), continuous systems optimized for throughput and service life (FHR.Line, for coating large surfaces), or even roll-to-roll systems the size of a house (FHR.Roll for coating flexible substrates – such as metal strips or polymer films).

Our system platforms use Sputtering, vapor deposition, PECVD and ALD technologies. Combinations of these technologies in one system without vacuum interruption can, of course, be implemented, not least due to the degree of modularity. 

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Your Contact Person

Do you have any questions?

Would you like to know more about our vacuum coating systems? Our Director of Product Management, Sven Häberlein, will be happy to help you. Give us a call or write us a message.