Inline Vacuum Coating Systems with PVD and Plasma CVD Technology
FHR.LINE Product Range
- Horizontal inline systems
- Vertical inline systems
- Carrierless and with carriers
- With and without carrier return systems
- With fully automatic substrate loading on request
Thin film coating systems for coating plates, wafers, wafers, for R&D, as well as pilot or high-volume series production.
- Printed circuit boards
- Thin-film solar cells
- Thin-film batteries
- Bipolar plates
- Wear or corrosion protection
- Decorative coating
- and much more
Inline concepts are the right answer for highly productive magnetron sputtering, thermal vapor deposition or PECVD coating of any flat substrate. We offer inline vacuum coating solutions individually tailored to your substrate size with a horizontal or vertical substrate layer.
Substrate pre-treatment by heating or etching, as well as fully automatic placement can be integrated by us on a customer-specific basis. Inline systems can be used as highly productive continuous systems with a constant product or as shuttle systems with a high degree of flexibility – thanks to interchangeable targets, inline systems can be used for a wide variety of applications.
With the systems in FHR.Line product family, our customers acquire high-quality coating machines that combine a wide range of features and benefits.
- Attractive investment and operating costs
- Fully automatic loading and unloading
- Double-sided coating possible
- Use of FHR’s own sputtering technology
- Reduced effort with regard to modification or expansion thanks to modular design
- Closed secondary cooling circuit possible
- Fully automatic process control
- High rate of productivity
Suitable project examples for the plant
- Measure Physical and Chemical Parameters
Thin Film Sensors – Inline
Highly productive sputtering system for the production of sensors
- Solar Thermal Power Plants
Absorber Pipes for Solar Thermal Energy
Sputter coating system for selective absorber layers on heat transfer tubes
- Highly Efficient Energy Suppliers for on the Move
Thin Film Photovoltaics on Wafers
Sputter coating system for anti-reflective coatings
Vacuum Coating Systems
OTHER PRODUCT SERIES
- Precision Sputter Coating Systems for Interference Optics Applications
FHR.STAR-EOSS® Product RangeThin film coating systems for the development and production of precision optics.
- Freely Configurable Cluster Systems
FHR.STAR Product RangeThin film coating systems for handling a wide variety of substrates – such as plates, disks, wafers or highly delicate applications, such as needles or pins.
- Sputtering, Vapor Deposition and PECVD Systems for Flexible Substrates
FHR.ROLL Product rangeThin film coating systems for coating plates, wafers and disks, for R&D and pilot or high-volume series production.
- Magnetron Sputtering Systems with Special Drum Concept for Small Substrates
FHR.BOXX Product RangeThin film coating systems for coating plates, disks, wafers, pins and needles for R&D and production.
You would like to learn more about our product? We are at your disposal. Contact us today to request detailed information, ask questions or receive individual advice.
Your interest is important to us, and we look forward to hearing from you!