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Sputtering, Vapor Deposition and PECVD Systems for Flexible Substrates

FHR.ROLL Product range

    Thin film coating systems for coating flexible substrates for R&D and pilot or high-volume series production.

  1. For coating plastic and metal films
  2. Flexible substrates up to 1.90 m width
  3. With or without airlock systems
  4. With or without front roller contact 

  1. Flexible electronics
  2. Flexible printed circuit boards
  3. Flexible sensor technology
  4. Thermal insulation films
  5. Display films
  6. OLED on film or ultra-thin glass
  7. Thin film solar cells
  8. Thin film batteries
  9. Metallic bipolar plates
  10. and much more 

Modern electronics are flexible. For the production of flexible solar cells, organic display films or flexible sensors, for example, we offer the right system concept with our roll-to-roll vacuum coating systems with PVD and PECVD technology.

Metal and plastic films are used as substrate materials; the coating width is individual. The system concept offers maximum flexibility in the process areas of sputtering and vapor deposition. A freely programmable belt drive and substrate temperature control enable the processing of different substrate materials and film thicknesses in a wide process window.

We also possess expertise in the integration of in-situ process measurement technology and derived online process controls.

The following technologies can be implemented on our roll-to-roll systems according to the specific requirements of the individual customer:

  1. Plasma etching/Pre-cleaning
  2. Magnetron sputtering
  3. Thermal vaporization
  4. PECVD 

With the systems in FHR.Roll product family, our customers acquire high-quality coating machines that combine a wide range of features and benefits:

  1. Tried-and-tested, reliable system concept
  2. Equally suitable for research and production
  3. Highly flexible system control using FHR’s own software programs
  4. If required without front touching (AVOtouch technology)
  5. Attractive investment and operating costs
  6. Excellent target yield
  7. Quick and easy target change 
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Your Contact Person

Do you have any questions?

Would you like to know more about our FHR.Roll product range? Our expert, Sven Häberlein, will be happy to help you. Get in touch with us.

Product Enquiry

You would like to learn more about our product? We are at your disposal. Contact us today to request detailed information, ask questions or receive individual advice.

Your interest is important to us, and we look forward to hearing from you!