REQUIREMENTS FOR THE SYSTEM
The system is to be integrated into a line for the production of thin film solar cells on rigid substrates. Their task is to deposit an anti-reflective layer that reduces the reflection of sunlight on the outside of the solar cell and thus provides the solar cell with more light for energy generation. The layer stack consists of several dielectric layers that have to be applied by sputtering – in some cases, reactively. As part of a 24/7 production line, the system must independently remove the substrates fed to it from the carrier boxes and deposit them there again after coating.
- High efficiency of the solar cell
- Low material requirements
- Cost-effective due to efficient mass production
SOLVING THE REQUIREMENTS
Inline systems are ideal for such consistent production tasks with a high rate of throughput. FHR.Line.1100-V is a vertical inline system in which the substrates for coating are moved in an upright position past highly productive tube sputtering sources that are also oriented in an upright position. The individual substrates are provided in boxes, removed by a placement robot programmed by FHR and placed in large carriers (substrate holders). The inclination of the system by 7° to the vertical ensures that the substrates remain in the carrier. With a cycle time of < 8 minutes, the carriers pass through the system, where they are brought into the vacuum in several airlocks separated by valves, tempered, coated and released back into the atmosphere via an airlock. A carrier return system brings the carriers back to the assembly cell, where a second robot removes the substrates and places them back into transport boxes. The carrier is then reloaded by the second robot and used again. stem, where they are brought into a vacuum in several airlocks separated by valves, tempered, coated and released back into the atmosphere via an airlock. A carrier return system brings the carriers back to the placement cell, where a second robot removes the substrates and places them back into transport boxes. The carrier is then reloaded by the second robot and used again.
THE SPECIAL FEATURES OF THE FHR.Line.1100-V
- Use in a 24/7 production line
- Carrier transport – including return completely automated
- Automatic loading and unloading with FHR’s own control system
- Highest material utilization and longest target service life through the use of tubular cathodes
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