Thin Film Technology

30 years of experience

Vacuum Equipment Manufacturing

The Thin Film Company

Coating Materials

Your partner for all sputtering target related subjects

Functional Coatings

Your surface – our coating services

Thin Film Technology

With 30 years of accomplishments, you will benefit from our unique vacuum coating expertise using PVD, PECVD and ALD thin film technology.

Equipment Manufacturing

Development, manufacturing, assembly and automation of coating systems. Learn more about our highly developed research and industrial solutions.

Coating Materials

We evaluate, develop & manufacture the consumables needed for the coating process. We supply quality-tested sputtering targets and take care of recycling them as well. 

Functional Coatings

The functions of coated surfaces are extremely diverse. If you only need a small- or medium-sized series of coatings, our coating services could be an attractive alternative for you.

The Thin Film Company

From small laboratory cluster type to house-sized production lines – FHR contributes to the success and profitability of its clients throughout the world. FHR is your one stop where you can get the answer to all your thin film requirements: Development of the coatings and first series are provided by our in-house coating services department. Our experienced team of designers, automation specialists, mechatronics engineers and technologists will develop and build your own Cluster, Inline, Roll-to-Roll or Box coating system. You can also simply knock on the same open door for sputtering targets, spare parts, retrofit jobs or maintenance. Come on in, we are looking forward to seeing you!

FHR.Star.600-EOSS®

Precision optical coatings on glass filters, prisms, lenses and semiconductor wafers

This latest product from the FHR.Star product series allow you to apply precise and homogeneous optical interference coatings on substrates up to 280 x 330 x 50 mm3 or diameters up to 300 mm.

News & Events 

| News

30 years of experience. 
30 years of highest quality. 
30 years FHR Anlagenbau GmbH.

In 1991, a single 6-inch wafer sputtering tool began our journey into vacuum deposition technologies.

| Fair Trade

SEMICON Europa 2021

Exhibition
Munich, Germany
Exhibition Center München
Hall A4, Booth B1155

Customer service