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Sputtering targets

www.fhr.biz Coating materials Sputtering targets

Large volume or individual pieces

We manufacture sputtering targets in all shapes and materials upon request

FHR develops and manufactures sputtering targets with a target length of up to 4000 mm according to customer requirements - large series as well as individual pieces. The first step is a brief discussion about your target request with our experienced material scientists who will recommend the technically feasible solutions for the target, bonding process and heat sink/back plate - even for unusual materials, material combinations or sputtering target shapes.

These solutions will take into account the feasibility of manufacturing the target material for your specific thin-film application, the material properties needed - such as grain sizes and purities - optionally selecting the appropriate bonding method and of course the financial aspects. We offer our customers short delivery times and the highest quality with in-house development and production of the targets, including special heat sinks and potential testing in performance and parameter test stands.

Various target shapes & materials

Inquiry planar targets
Inquiry rotatable targets

Galery of sputtering targets

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[Translate to Englisch:] Alternativer Text

Contact Target Materials

Anne Reichert
Head of Customer Focus Center

+49 35205 520-555 target[at]fhr.de

Our coating materials

Metal

Composition

Plane

Rotary

Purity

Aluminium

Al

x

x

99.99- 99.9995 %

Antimon

Sb

x

  

99.99- 99.999 %

Bismuth

Bi

x

  

99.5, 99.999 %

Boron

B

x

  

99.9 %

Carbon

C

x

  

99.5, 99.999 %

Cerium

Ce

x

  

99.9, 99.99 %

Chromium

Cr

x

x

99.8- 99.98 %

Cobalt

Co

x

  

99.8 %

Copper

Cu

x

x

99.9, 99.9999 %

Erbium

Er

x

  

99.9 %

Germanium

Ge

x

  

99.5, 99.999 %

Gold

Au

x

x

99.99, 99.999 %

Hafnium

Hf

x

  

99.9 %

Holmium

Ho

x

  

99.9 %

Indium

In

x

x

99.99- 99.9999 %

Iridium

Ir

x

  

99.95, 99.99 %

Iron

Fe

x

  

99.9 %

Magnesium

Mg

x

  

99.9, 99.99 %

Manganese

Mn

x

  

99.9 %

Molybdeniu

Mo

x

x

99.95 %

Nickel

Ni

x

  

99.7, 99.995 %

Niobium

Nb

x

x

99.95 %

Palladium

Pd

x

  

99.95 %

Platinium

Pt

x

  

99.99 %

Rhenium

Re

x

  

99.99 %

Ruthenium

Ru

x

  

99.9 %

Scandium

Sc

x

  

99.9 %

Silicon

Si

x

x

99.99, 99.9999 %

Silver

Ag

x

x

99.9, 99.99 %

Tantalum

Ta

x

x

99.95 %

Terbium

Tb

x

  

99.9 %

Tin

Sn

x

x

99.99, 99.999 %

Titanium

Ti

x

x

99.7- 99.995 %

Tungsten

W

x

  

99.95 %

Vanadium

V

x

  

99.8 %

Yttrium

Y

x

  

99.9 %

Zinc

Zn

x

  

99.99 %

Zirconium

Zr

x

  

99.8 %

PDF list of our coating materials

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Alloys

Composition

Plane

Rotary

Purity

Aluminium - Chromium

(Al)X (Cr)1-X

x

x

99.99 %

Aluminium - Cobalt

(Al)X (Co)1-X

x

  

99.95 %

Aluminium - Copper

(Al)X (Cu)1-X

x

x

99.95 %

Aluminium - Iron

(Al)X (Fe)1-X

x

  

99.99 %

Aluminium - Silicon

(Al)X (Si)1-X

x

x

99.5- 99.95 %

Aluminium - Silicon - Copper

(Al)X (Si)Y (Cu)Z

x

  

99.5- 99.95 %

Aluminium - Magnesium - Solicon

(Al)X (Mg)Y (Si)Z

x

  

99.5- 99.95 %

Aluminium - Titannim

(Al)50 (Ti)50

x

  

99.95 %

Chromium - Nickel

(Cr)X(Ni)1-X

x

x

99.9 %

Chromium - Cobalt

(Cr)X(Co)1-X

x

  

99.95 %

Chromium - Cobalt - Nickel

(Cr)X (Co)Y (Ni)Z

x

  

99.95 %

Cobalt - Nickel

(Co)X(Ni)1-X

x

  

99.95 %

Iron - Nickel

(Fe)19 (Ni)8

x

  

99.9 %

Indium - Tin

(In)X (Sn)1-X

x

x

99.9- 99.995 %

Nickel - Vanadium

(Ni)93 (V)07

x

x

99.5- 99.95 %

Titannium - Tungsten

(Ti)10 (W)90

x

  

99.9, 99.995 %

Titannim - Tungsten

(Ti)15 (W)85

x

  

99.9, 99.995 %

Yttrium - Barium - Copper - Oxide

  

x

  

99.9, 99.995 %

Borides

Composition

Plane

Rotary

Purity

Aluminium boride

AlB2

x

  

99 %

Lanthanium boride

LaB6

x

  

99.5 %

Titanium boride

TiB2

x

  

99.5 %
         

Carbides

Composition

Plane

Rotary

Purity

Boron carbide

B4C

x

  

99.5 %

Chromium carbide

Cr3C2

x

  

99.5 %

Molybdenum carbide

MoC

x

  

99.5 %

Niobium carbide

NbC

x

  

99.5 %

Silicon carbide

SiC

x

  

99.5, 99.9 %

Tantalum carbide

TaC

x

  

99.5 %

Titanium carbide

TiC

x

  

99.5 %

Tungsten carbide

WC

x

  

99.5 %

Vanadium carbide

VC

x

  

99.5 %

Zirconium carbide

ZrC

x

  

99.5 %

Nitrides

Composition

Plane

Rotary

Purity

Aluminium nitride

AlN

x

  

99, 99.8 %

Boron nitride

BN

x

  

97.5, 99.9 %

Hafnium nitride

HfN

x

  

99.5 %

Silicon nitride

Si3N4

x

  

98, 99.9 %

Tantalum nitride

TaN

x

  

99.5 %

Titanium nitride

TiN

x

  

99.5 %

Vanadium nitride

VN

x

  

99.5 %

Zirconium nitride

ZrN

x

  

99.5 %
         

Oxides

Composition

Plane

Rotary

Purity

Aluminium oxide

Al2O3

x

  

99.99 %

Antimony oxide

Sb2O3

x

  

99.99 %

Barium titanate

BaTiO3

x

  

99.9 %

Bismuth oxide

Bi2O3

x

  

99.9 %

Bismuth titanate

Bi4TiO3

x

  

99.9 %

Cerium oxide

CeO2

x

  

99.99 %

Gallium oxide

Ga2O3

x

  

99.99- 99.999 %

Hafnium oxide

HfO2

x

  

99.9 %

Indium oxide

In2O3

x

  

99.95- 99.999 %

Indium tin oxide

(In2O3)X (SnO2)1-X

x

x

99.95- 99.999 %

Iron oxide

Fe2O3, Fe2O4

x

  

99.5- 99.9 %

Magnesium oxide

MgO

x

  

99.5- 99.95 %

Niobium oxide

Nb2O5

x

x

99.5- 99.95 %

Silicon oxide

SiO2

x

  

99.9- 99.999 %

Strontium titanat

SrTiO3

x

  

99.9 %

Tantalum oxide

Ta2O5

x

  

99.95 %

Titanium oxide

TiO2

x

x

99.5- 99.95 %

Tin oxide

SnO2

x

  

99.9, 99.99 %

Tin oxide-Antimon

SnO2 - Sb2O3

x

  

99.99 %

Zinc oxide

ZnO

x

x

99.9 %

Zirconium oxide

ZrO2

x

  

99.7 %

Silicides

Composition

Plane

Rotary

Purity

Aluminium silicide

AlSi2

x

  

99.5 %

Chromium silicide

CrSi2, Cr3Si

x

  

99.5 %

Molybdenum silicide

MoSi2

x

  

99.5 %

Tantalum silicide

TaSi2, TaSi3

x

  

99.5 %

Sulfides

Composition

Plane

Rotary

Purity

Indium sulfide

In2S3

x

  

99.9, 99.99%

Molybdnum sulfide

MoS2

x

  

99.9 %

Zinc sulfide

ZnS

x

  

99.9 %

Tellurides

Composition

Plane

Rotary

Purity

Antimontelluride

Sb2Te3

x

  

99.5- 99.99 %

Bismuth telluride

Bi2Te3

x

  

99.5- 99.99 %

Manganes telluride

MnTe

x

  

99.5- 99.99 %

Zinc telluride

ZnTe

x

  

99.5- 99.99 %