Sputtering targets

Large volume or individual pieces

We manufacture sputtering targets in all shapes and materials upon request

FHR develops and manufactures sputtering targets with a target length of up to 4000 mm according to customer requirements - large series as well as individual pieces. The first step is a brief discussion about your target request with our experienced material scientists who will recommend the technically feasible solutions for the target, bonding process and heat sink/back plate - even for unusual materials, material combinations or sputtering target shapes.

These solutions will take into account the feasibility of manufacturing the target material for your specific thin-film application, the material properties needed - such as grain sizes and purities - optionally selecting the appropriate bonding method and of course the financial aspects. We offer our customers short delivery times and the highest quality with in-house development and production of the targets, including special heat sinks and potential testing in performance and parameter test stands.

Galery of sputtering targets

Contact Target Materials

Marian Böhling
Head of Sputtering Targets & Coating Service

+49 35205 520-317 marian.boehling[at]fhr.de target[at]fhr.de

Our coating materials

Metal

Composition

Plane

Rotary

Purity

Aluminium

Al

x

x

99.99- 99.9995 %

Antimon

Sb

x

 

99.99- 99.999 %

Bismuth

Bi

x

 

99.5, 99.999 %

Boron

B

x

 

99.9 %

Carbon

C

x

 

99.5, 99.999 %

Cerium

Ce

x

 

99.9, 99.99 %

Chromium

Cr

x

x

99.8- 99.98 %

Cobalt

Co

x

 

99.8 %

Copper

Cu

x

x

99.9, 99.9999 %

Erbium

Er

x

 

99.9 %

Germanium

Ge

x

 

99.5, 99.999 %

Gold

Au

x

x

99.99, 99.999 %

Hafnium

Hf

x

 

99.9 %

Holmium

Ho

x

 

99.9 %

Indium

In

x

x

99.99- 99.9999 %

Iridium

Ir

x

 

99.95, 99.99 %

Iron

Fe

x

 

99.9 %

Magnesium

Mg

x

 

99.9, 99.99 %

Manganese

Mn

x

 

99.9 %

Molybdeniu

Mo

x

x

99.95 %

Nickel

Ni

x

 

99.7, 99.995 %

Niobium

Nb

x

x

99.95 %

Palladium

Pd

x

 

99.95 %

Platinium

Pt

x

 

99.99 %

Rhenium

Re

x

 

99.99 %

Ruthenium

Ru

x

 

99.9 %

Scandium

Sc

x

 

99.9 %

Silicon

Si

x

x

99.99, 99.9999 %

Silver

Ag

x

x

99.9, 99.99 %

Tantalum

Ta

x

x

99.95 %

Terbium

Tb

x

 

99.9 %

Tin

Sn

x

x

99.99, 99.999 %

Titanium

Ti

x

x

99.7- 99.995 %

Tungsten

W

x

 

99.95 %

Vanadium

V

x

 

99.8 %

Yttrium

Y

x

 

99.9 %

Zinc

Zn

x

 

99.99 %

Zirconium

Zr

x

 

99.8 %

PDF list of our coating materials

Alloys

Composition

Plane

Rotary

Purity

Aluminium - Chromium

(Al)X (Cr)1-X

x

x

99.99 %

Aluminium - Cobalt

(Al)X (Co)1-X

x

 

99.95 %

Aluminium - Copper

(Al)X (Cu)1-X

x

x

99.95 %

Aluminium - Iron

(Al)X (Fe)1-X

x

 

99.99 %

Aluminium - Silicon

(Al)X (Si)1-X

x

x

99.5- 99.95 %

Aluminium - Silicon - Copper

(Al)X (Si)Y (Cu)Z

x

 

99.5- 99.95 %

Aluminium - Magnesium - Solicon

(Al)X (Mg)Y (Si)Z

x

 

99.5- 99.95 %

Aluminium - Titannim

(Al)50 (Ti)50

x

 

99.95 %

Chromium - Nickel

(Cr)X(Ni)1-X

x

x

99.9 %

Chromium - Cobalt

(Cr)X(Co)1-X

x

 

99.95 %

Chromium - Cobalt - Nickel

(Cr)X (Co)Y (Ni)Z

x

 

99.95 %

Cobalt - Nickel

(Co)X(Ni)1-X

x

 

99.95 %

Iron - Nickel

(Fe)19 (Ni)8

x

 

99.9 %

Indium - Tin

(In)X (Sn)1-X

x

x

99.9- 99.995 %

Nickel - Vanadium

(Ni)93 (V)07

x

x

99.5- 99.95 %

Titannium - Tungsten

(Ti)10 (W)90

x

 

99.9, 99.995 %

Titannim - Tungsten

(Ti)15 (W)85

x

 

99.9, 99.995 %

Yttrium - Barium - Copper - Oxide

 

x

 

99.9, 99.995 %

Borides

Composition

Plane

Rotary

Purity

Aluminium boride

AlB2

x

 

99 %

Lanthanium boride

LaB6

x

 

99.5 %

Titanium boride

TiB2

x

 

99.5 %

         

Carbides

Composition

Plane

Rotary

Purity

Boron carbide

B4C

x

 

99.5 %

Chromium carbide

Cr3C2

x

 

99.5 %

Molybdenum carbide

MoC

x

 

99.5 %

Niobium carbide

NbC

x

 

99.5 %

Silicon carbide

SiC

x

 

99.5, 99.9 %

Tantalum carbide

TaC

x

 

99.5 %

Titanium carbide

TiC

x

 

99.5 %

Tungsten carbide

WC

x

 

99.5 %

Vanadium carbide

VC

x

 

99.5 %

Zirconium carbide

ZrC

x

 

99.5 %

Nitrides

Composition

Plane

Rotary

Purity

Aluminium nitride

AlN

x

 

99, 99.8 %

Boron nitride

BN

x

 

97.5, 99.9 %

Hafnium nitride

HfN

x

 

99.5 %

Silicon nitride

Si3N4

x

 

98, 99.9 %

Tantalum nitride

TaN

x

 

99.5 %

Titanium nitride

TiN

x

 

99.5 %

Vanadium nitride

VN

x

 

99.5 %

Zirconium nitride

ZrN

x

 

99.5 %

         

Oxides

Composition

Plane

Rotary

Purity

Aluminium oxide

Al2O3

x

 

99.99 %

Antimony oxide

Sb2O3

x

 

99.99 %

Barium titanate

BaTiO3

x

 

99.9 %

Bismuth oxide

Bi2O3

x

 

99.9 %

Bismuth titanate

Bi4TiO3

x

 

99.9 %

Cerium oxide

CeO2

x

 

99.99 %

Gallium oxide

Ga2O3

x

 

99.99- 99.999 %

Hafnium oxide

HfO2

x

 

99.9 %

Indium oxide

In2O3

x

 

99.95- 99.999 %

Indium tin oxide

(In2O3)X (SnO2)1-X

x

x

99.95- 99.999 %

Iron oxide

Fe2O3, Fe2O4

x

 

99.5- 99.9 %

Magnesium oxide

MgO

x

 

99.5- 99.95 %

Niobium oxide

Nb2O5

x

x

99.5- 99.95 %

Silicon oxide

SiO2

x

 

99.9- 99.999 %

Strontium titanat

SrTiO3

x

 

99.9 %

Tantalum oxide

Ta2O5

x

 

99.95 %

Titanium oxide

TiO2

x

x

99.5- 99.95 %

Tin oxide

SnO2

x

 

99.9, 99.99 %

Tin oxide-Antimon

SnO2 - Sb2O3

x

 

99.99 %

Zinc oxide

ZnO

x

x

99.9 %

Zirconium oxide

ZrO2

x

 

99.7 %

Silicides

Composition

Plane

Rotary

Purity

Aluminium silicide

AlSi2

x

 

99.5 %

Chromium silicide

CrSi2, Cr3Si

x

 

99.5 %

Molybdenum silicide

MoSi2

x

 

99.5 %

Tantalum silicide

TaSi2, TaSi3

x

 

99.5 %

Sulfides

Composition

Plane

Rotary

Purity

Indium sulfide

In2S3

x

 

99.9, 99.99%

Molybdnum sulfide

MoS2

x

 

99.9 %

Zinc sulfide

ZnS

x

 

99.9 %

Tellurides

Composition

Plane

Rotary

Purity

Antimontelluride

Sb2Te3

x

 

99.5- 99.99 %

Bismuth telluride

Bi2Te3

x

 

99.5- 99.99 %

Manganes telluride

MnTe

x

 

99.5- 99.99 %

Zinc telluride

ZnTe

x

 

99.5- 99.99 %