Large volume or individual pieces
We manufacture sputtering targets in all shapes and materials upon request
FHR develops and manufactures sputtering targets with a target length of up to 4000 mm according to customer requirements - large series as well as individual pieces. The first step is a brief discussion about your target request with our experienced material scientists who will recommend the technically feasible solutions for the target, bonding process and heat sink/back plate - even for unusual materials, material combinations or sputtering target shapes.
These solutions will take into account the feasibility of manufacturing the target material for your specific thin-film application, the material properties needed - such as grain sizes and purities - optionally selecting the appropriate bonding method and of course the financial aspects. We offer our customers short delivery times and the highest quality with in-house development and production of the targets, including special heat sinks and potential testing in performance and parameter test stands.
Galery of sputtering targets
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Our coating materials
Metal |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Aluminium |
Al |
x |
x |
99.99- 99.9995 % |
Antimon |
Sb |
x |
99.99- 99.999 % |
|
Bismuth |
Bi |
x |
99.5, 99.999 % |
|
Boron |
B |
x |
99.9 % |
|
Carbon |
C |
x |
99.5, 99.999 % |
|
Cerium |
Ce |
x |
99.9, 99.99 % |
|
Chromium |
Cr |
x |
x |
99.8- 99.98 % |
Cobalt |
Co |
x |
99.8 % |
|
Copper |
Cu |
x |
x |
99.9, 99.9999 % |
Erbium |
Er |
x |
99.9 % |
|
Germanium |
Ge |
x |
99.5, 99.999 % |
|
Gold |
Au |
x |
x |
99.99, 99.999 % |
Hafnium |
Hf |
x |
99.9 % |
|
Holmium |
Ho |
x |
99.9 % |
|
Indium |
In |
x |
x |
99.99- 99.9999 % |
Iridium |
Ir |
x |
99.95, 99.99 % |
|
Iron |
Fe |
x |
99.9 % |
|
Magnesium |
Mg |
x |
99.9, 99.99 % |
|
Manganese |
Mn |
x |
99.9 % |
|
Molybdeniu |
Mo |
x |
x |
99.95 % |
Nickel |
Ni |
x |
99.7, 99.995 % |
|
Niobium |
Nb |
x |
x |
99.95 % |
Palladium |
Pd |
x |
99.95 % |
|
Platinium |
Pt |
x |
99.99 % |
|
Rhenium |
Re |
x |
99.99 % |
|
Ruthenium |
Ru |
x |
99.9 % |
|
Scandium |
Sc |
x |
99.9 % |
|
Silicon |
Si |
x |
x |
99.99, 99.9999 % |
Silver |
Ag |
x |
x |
99.9, 99.99 % |
Tantalum |
Ta |
x |
x |
99.95 % |
Terbium |
Tb |
x |
99.9 % |
|
Tin |
Sn |
x |
x |
99.99, 99.999 % |
Titanium |
Ti |
x |
x |
99.7- 99.995 % |
Tungsten |
W |
x |
99.95 % |
|
Vanadium |
V |
x |
99.8 % |
|
Yttrium |
Y |
x |
99.9 % |
|
Zinc |
Zn |
x |
99.99 % |
|
Zirconium |
Zr |
x |
99.8 % |
PDF list of our coating materials
Alloys |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Aluminium - Chromium |
(Al)X (Cr)1-X |
x |
x |
99.99 % |
Aluminium - Cobalt |
(Al)X (Co)1-X |
x |
99.95 % |
|
Aluminium - Copper |
(Al)X (Cu)1-X |
x |
x |
99.95 % |
Aluminium - Iron |
(Al)X (Fe)1-X |
x |
99.99 % |
|
Aluminium - Silicon |
(Al)X (Si)1-X |
x |
x |
99.5- 99.95 % |
Aluminium - Silicon - Copper |
(Al)X (Si)Y (Cu)Z |
x |
99.5- 99.95 % |
|
Aluminium - Magnesium - Solicon |
(Al)X (Mg)Y (Si)Z |
x |
99.5- 99.95 % |
|
Aluminium - Titannim |
(Al)50 (Ti)50 |
x |
99.95 % |
|
Chromium - Nickel |
(Cr)X(Ni)1-X |
x |
x |
99.9 % |
Chromium - Cobalt |
(Cr)X(Co)1-X |
x |
99.95 % |
|
Chromium - Cobalt - Nickel |
(Cr)X (Co)Y (Ni)Z |
x |
99.95 % |
|
Cobalt - Nickel |
(Co)X(Ni)1-X |
x |
99.95 % |
|
Iron - Nickel |
(Fe)19 (Ni)8 |
x |
99.9 % |
|
Indium - Tin |
(In)X (Sn)1-X |
x |
x |
99.9- 99.995 % |
Nickel - Vanadium |
(Ni)93 (V)07 |
x |
x |
99.5- 99.95 % |
Titannium - Tungsten |
(Ti)10 (W)90 |
x |
99.9, 99.995 % |
|
Titannim - Tungsten |
(Ti)15 (W)85 |
x |
99.9, 99.995 % |
|
Yttrium - Barium - Copper - Oxide |
x |
99.9, 99.995 % |
Borides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Aluminium boride |
AlB2 |
x |
99 % |
|
Lanthanium boride |
LaB6 |
x |
99.5 % |
|
Titanium boride |
TiB2 |
x |
99.5 % |
|
Carbides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Boron carbide |
B4C |
x |
99.5 % |
|
Chromium carbide |
Cr3C2 |
x |
99.5 % |
|
Molybdenum carbide |
MoC |
x |
99.5 % |
|
Niobium carbide |
NbC |
x |
99.5 % |
|
Silicon carbide |
SiC |
x |
99.5, 99.9 % |
|
Tantalum carbide |
TaC |
x |
99.5 % |
|
Titanium carbide |
TiC |
x |
99.5 % |
|
Tungsten carbide |
WC |
x |
99.5 % |
|
Vanadium carbide |
VC |
x |
99.5 % |
|
Zirconium carbide |
ZrC |
x |
99.5 % |
Nitrides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Aluminium nitride |
AlN |
x |
99, 99.8 % |
|
Boron nitride |
BN |
x |
97.5, 99.9 % |
|
Hafnium nitride |
HfN |
x |
99.5 % |
|
Silicon nitride |
Si3N4 |
x |
98, 99.9 % |
|
Tantalum nitride |
TaN |
x |
99.5 % |
|
Titanium nitride |
TiN |
x |
99.5 % |
|
Vanadium nitride |
VN |
x |
99.5 % |
|
Zirconium nitride |
ZrN |
x |
99.5 % |
|
Oxides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Aluminium oxide |
Al2O3 |
x |
99.99 % |
|
Antimony oxide |
Sb2O3 |
x |
99.99 % |
|
Barium titanate |
BaTiO3 |
x |
99.9 % |
|
Bismuth oxide |
Bi2O3 |
x |
99.9 % |
|
Bismuth titanate |
Bi4TiO3 |
x |
99.9 % |
|
Cerium oxide |
CeO2 |
x |
99.99 % |
|
Gallium oxide |
Ga2O3 |
x |
99.99- 99.999 % |
|
Hafnium oxide |
HfO2 |
x |
99.9 % |
|
Indium oxide |
In2O3 |
x |
99.95- 99.999 % |
|
Indium tin oxide |
(In2O3)X (SnO2)1-X |
x |
x |
99.95- 99.999 % |
Iron oxide |
Fe2O3, Fe2O4 |
x |
99.5- 99.9 % |
|
Magnesium oxide |
MgO |
x |
99.5- 99.95 % |
|
Niobium oxide |
Nb2O5 |
x |
x |
99.5- 99.95 % |
Silicon oxide |
SiO2 |
x |
99.9- 99.999 % |
|
Strontium titanat |
SrTiO3 |
x |
99.9 % |
|
Tantalum oxide |
Ta2O5 |
x |
99.95 % |
|
Titanium oxide |
TiO2 |
x |
x |
99.5- 99.95 % |
Tin oxide |
SnO2 |
x |
99.9, 99.99 % |
|
Tin oxide-Antimon |
SnO2 - Sb2O3 |
x |
99.99 % |
|
Zinc oxide |
ZnO |
x |
x |
99.9 % |
Zirconium oxide |
ZrO2 |
x |
99.7 % |
Silicides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Aluminium silicide |
AlSi2 |
x |
99.5 % |
|
Chromium silicide |
CrSi2, Cr3Si |
x |
99.5 % |
|
Molybdenum silicide |
MoSi2 |
x |
99.5 % |
|
Tantalum silicide |
TaSi2, TaSi3 |
x |
99.5 % |
Sulfides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Indium sulfide |
In2S3 |
x |
99.9, 99.99% |
|
Molybdnum sulfide |
MoS2 |
x |
99.9 % |
|
Zinc sulfide |
ZnS |
x |
99.9 % |
Tellurides |
Composition |
Plane |
Rotary |
Purity |
---|---|---|---|---|
Antimontelluride |
Sb2Te3 |
x |
99.5- 99.99 % |
|
Bismuth telluride |
Bi2Te3 |
x |
99.5- 99.99 % |
|
Manganes telluride |
MnTe |
x |
99.5- 99.99 % |
|
Zinc telluride |
ZnTe |
x |
99.5- 99.99 % |