Early years of thin film technology in Dresden
When the first sputtering systems for industrial vacuum coatings were developed and built in Dresden, the discovery of the "sputtering" phenomenon was already more than a hundred years old (William Robert Grove, 1852). However, suitable vacuum pumps were not invented until the 1970s, at which time it was recognized that sputtering deposition was an advantageous alternative to thermal evaporation, which had dominated the field up to that date. The development of vacuum systems for sputtering deposition especially for microelectronics was promoted in Dresden - and VEB Elektromat Dresden was already founded in 1961 as a supplier of technical equipment for the production of semiconductor components. The first sputtering systems for vacuum coatings in industrial applications were developed and built in Dresden in 1975. In the 1980s, the three founders of our company were already involved in innovative industrial projects for combining coating and etching technologies in microelectronics. FHR Anlagenbau GmbH was founded in 1991.