OUR ORIGIN
From electrode sputtering to the takeover by the Vital Group – the history of FHR
STARTING OUT WITH THIN FILM TECHNOLOGY IN DRESDEN
Innovation, experience and the courage to change are the drivers of every new technology. When FHR Anlagenbau GmbH was founded, it was Dr. Reinhard Fendler (“F”), Wolfgang Hentsch (“H”) and Christian Ränsch (“R”) who combined their synergies in their respective fields of electrical engineering, physics and mechanical engineering – as well as their many years of experience in the field of thin film technology – to create a common vision: to implement innovative, functional coatings in tailor-made system concepts.
We started out as pioneers in the industry – today, we are The Thin Film Company
As early as the 1980s, the subsequent founders of our company were involved in innovative industrial projects for
the use of coating and etching technologies in microelectronics. Together, they implemented a wide range of projects, and played a key role in advancing the development of thin film technology for over 20 years.
Prior to this development, it took roughly 120 years following the discovery of the phenomenon of “Sputtering” by William Robert Grove in 1852 for the first atomizing systems for industrial vacuum coatings to be developed and built in Dresden. The technology revolutionized the semiconductor industry in the 1960s and 1970s. It was strongly promoted in Dresden, in particular, thereby laying the foundation for the region’s current development into one of the most important industrial locations in microelectronics.
OUR HISTORY - FROM VEB ELEKTROMAT TO AN INTERNATIONAL HIGH-TECH COMPANY
2020
FHR becomes 100% daughter company of the Vital Group
2017
Continuation of collaborative research with SERIS in the area of high-quality TCO and contact layers.
2017
Large order from Manz AG to supply inline coating technology for CIGS solar module factories
2017
Delivery of the FHR.Star.600-EOSS precision coating system for large optical substrates, prisms and lenses
2015
Supply of four vertical inline coating systems for metallic and dielectric coatings with fully automatic robot-controlled loading and unloading
2015
Supply of a 1600 mm roll-to-roll sputtering system for optically transparent films (low-E coating)
2013
Delivery of 3rd generation equipment for vacuum coating of solar thermal absorber tubes for CSP power plants
2012
Supply of multiple 1600 mm roll-to-roll sputtering systems and 800 mm roll-to-roll evaporation systems for the production of flexible CIGS-based solar cells
2011
Delivery of the EOSS® sputtering system for precision optical applications to the Fraunhofer IST
2011
Delivery of the world's first production line for roll-to-roll vacuum coating for 300 mm wide organic solar cells to the company Heliatek
2009
Opening of the new office complex and two additional production halls in Ottendorf-Okrilla
2008
Beginning of the delivery of large-area glass coating systems for the photovoltaic industry
2008
FHR becomes a 100% subsidiary of centrotherm photovoltaics AG
2007
Construction and delivery of the first CVD process equipment for atomic layer deposition (ALD) on 300 mm wafers
2003
Development of innovative roll-to-roll system solutions for film coating
2000
Commissioning of the new building at the Ottendorf-Okrilla location
1997
Initial certification according to DIN EN ISO 9001
1996
Construction and delivery of the first RIE plasma etching systems for R&D applications
1996
Beginning of strategic cooperation with leading industrial customers for the development of complex systems
1994
Expansion and extension of manufacturing and bonding technology for large sputtering targets
1993
Relocation of the company headquarters from Dresden to Ottendorf-Okrilla
1992
Development of novel cluster and inline system solutions for vacuum coating
1991
Foundation of the company FHR Anlagenbau GmbH in reunited Germany by three engineers from the former VEB Elektromat in Dresden
1980
Merging of VEB Elektromat Dresden and the Institute for Microelectronics Dresden to form VEB Zentrum für Forschung und Technologie Mikroelektronik (ZFMT)
1975
Development and construction of the first atomization systems for industry-related vacuum coatings in Dresden
1961
Foundation of VEB Elektromat Dresden as a supplier of technological equipment for the production of semiconductor devices
1852
Observation of the phenomenon of electrode sputtering by William R. Grove
1656
Otto von Guericke demonstrated the effect of air pressure for the first time in 1656 using two half-spheres and a specially developed vacuum pump. It is not known how effective the vacuum was. But it was so intense that 16 horses could not pull them apart.
Learn more about FHR
Career
Fancy an exciting and varied career at FHR Anlagenbau GmbH? Then discover our job and training opportunities here, and learn more about FHR as an employer.
Memberships
FHR Anlagenbau GmbH is part of a renowned network of organizations and associations in the fields of business, regional evolution and human resources development.
Partners
Our sales and service partners can be found around the globe. FHR is also part of the Vital Group Company, which has other locations. Discover more here!