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Precision Sputter Coating Systems for Interference Optics Applications

FHR.STAR-EOSS® Product Range

Thin film coating systems for the development and production of precision optics.

Inline Vacuum Coating Systems with PVD and Plasma CVD Technology

FHR.LINE Product Range

Thin film coating systems for coating plates, wafers and disks, for R&D and pilot or high-volume series production.

Freely Configurable Cluster Systems

FHR.STAR Product Range

Thin film coating systems for handling a wide variety of substrates – such as plates, disks, wafers or highly delicate applications, such as needles or pins.

Sputtering, Vapor Deposition and PECVD Systems for Flexible Substrates

FHR.ROLL Product range

Thin film coating systems for coating plates, wafers and disks, for R&D and pilot or high-volume series production.

Magnetron Sputtering Systems with Special Drum Concept for Small Substrates

FHR.BOXX Product Range

Thin film coating systems for coating plates, disks, wafers, pins and needles for R&D and production.