1. Electronics
2. Printed circuit boards
3. Sensors
4. Display
5. OLED
6. Thin-film solar cells
7. Thin-film batteries
8. Bipolar plates
9. Filters
10. Wear or corrosion protection
11. Decorative coating
12. and much more

Inline concepts are the right answer for highly productive magnetron sputtering, thermal vapor deposition or PECVD coating of any flat substrate. We offer inline vacuum coating solutions individually tailored to your substrate size with a horizontal or vertical substrate layer.

Substrate pre-treatment by heating or etching, as well as fully automatic placement can be integrated by us on a customer-specific basis. Inline systems can be used as highly productive continuous systems with a constant product or as shuttle systems with a high degree of flexibility – thanks to interchangeable targets, inline systems can be used for a wide variety of applications. 

The following technologies can be implemented on our inline systems according to the specific requirements of the individual customer: 

1. Plasma etching/pre-cleaning
2. Magnetron sputtering
3. Thermal vapor deposition
4. PECVD

With the systems in FHR.Line product family, our customers acquire high-quality coating machines that combine a wide range of features and benefits.

1. Attractive investment and operating costs
2. Fully automatic loading and unloading
3. Double-sided coating possible
4. Use of FHR’s own sputtering technology
5. Reduced effort with regard to modification or expansion thanks to modular design
6. Closed secondary cooling circuit possible
7. Fully automatic process control
8. High rate of productivity