VACUUM COATING SYSTEMS
Are you looking for the optimum vacuum coating solution for your project?
Our systems are the perfect choice for you.
PROVEN COATING SOLUTIONS
Thin and ultra-thin functional coatings must fulfill the highest requirements during the deposition process. We offer you reliable coating solutions with our tried-and-tested systems.
Our portfolio includes both tried-and-tested modular coating systems and specialized systems tailored to your individual requirements – we have been your experts in the manufacturing of vacuum coating systems for more than 30 years.
Our Vacuum Coating Systems
OUR FHR PRODUCT RANGES AT A GLANCE
Freely Configurable Cluster Systems
FHR.STAR Product Range
- Proven, flexible modular concept with central transfer arm handling
- Diverse technological processes
- Handling as a single substrate or in a carrier
- Manual loading or automatic handling from the magazine
- Clean room connection possible
Thin film coating systems for handling a wide variety of substrates – such as plates, disks, wafers or highly delicate applications, such as needles or pins. Be it layer deposition, pre- or post-treatment: with the combinable modules of the STAR series, a wide range of tasks can be mastered in research and development, pilot production or the processing of small to medium-sized series.
- Microelectronics
- Printed circuit boards
- Sensors
- Display
- OLED
- Thin film solar cells
- Thin film batteries
- Filters
- and much more
An advanced modular system with numerous variation options, maximum flexibility in the configuration of the individual modules, numerous intervention options via our in-depth formula editor: These and many other features make our vacuum processing systems from the FHR.Star product range the #1 choice for R&D applications at the cutting edge of research.
In addition, FHR.Star systems are ideally suited to solving tasks in the microelectronics and semiconductor industry thanks to their stringent design for standard wafers.
The choice is yours: With our FHR.Star product range, we can draw on a broad spectrum of previously implemented systems and compile a suitable system for you. Or we can work with you to develop your own customized configuration.
The following technologies are available for use in our FHR.Star systems:
- Plasma etching/Pre-cleaning
- Magnetron sputtering
- Thermal evaporation
- Electron Beam Evaporation (or “E-Beam Evaporation”)
- Atomic layer deposition (ALD & SALD)
- Heat treatment
We will be happy to discuss deviating processes with you personally!
With the systems in FHR.Star product family, our customers acquire high-quality coating systems that combine quality, variability and reliability.
- Maximum flexibility thanks to modular system concept
- Customized configuration according to customer requirements
- Effective use of space thanks to variable arrangement
- Adjustable target-substrate distance
- Quick and easy target change
- Substrates in typical wafer sizes
- Fully automatic process control
- Attractive investment and operating costs
Suitable project examples for the plant
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Connectors and High-frequency ConductorsCorrosion-resistant Electronics
Highly flexible sputter coating system for electronic functional layers.
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Temperature-sensitive ElectronicsNew Materials for Thin Layers
Combination coating system with PECVD, ALD and FLA technology for layer development
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New Methods of Data ProcessingMicroelectronics of the Future
Highly flexible sputter coating system for electronic functional layers
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Measure Physical and Chemical ParametersThin Film Sensor Cluster
Flexible coating system for the production of various sensors
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MEMS, Sensors and Thin Film BatteriesMEMS & Batteries
ALD coating system on 300 mm wafers for miniaturized complex systems
Your Contact Person
Do you have any questions?
Would you like to know more about our FHR.Star product range? Our expert, Peter Stiewe, will be happy to help you. Get in touch with us.
Vacuum Coating Systems
OTHER PRODUCT SERIES
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Precision Sputter Coating Systems for Interference Optics ApplicationsFHR.STAR-EOSS® Product Range
Thin film coating systems for the development and production of precision optics. -
Inline Vacuum Coating Systems with PVD and Plasma CVD TechnologyFHR.LINE Product Range
Thin film coating systems for coating plates, wafers and disks, for R&D and pilot or high-volume series production. -
Sputtering, Vapor Deposition and PECVD Systems for Flexible SubstratesFHR.ROLL Product range
Thin film coating systems for coating plates, wafers and disks, for R&D and pilot or high-volume series production. -
Magnetron Sputtering Systems with Special Drum Concept for Small SubstratesFHR.BOXX Product Range
Thin film coating systems for coating plates, disks, wafers, pins and needles for R&D and production.
Product Enquiry
You would like to learn more about our product? We are at your disposal. Contact us today to request detailed information, ask questions or receive individual advice.
Your interest is important to us, and we look forward to hearing from you!
LOOKING FOR A SPUTTER TARGET?
We develop and manufacture sputtering targets up to 4000 mm target length as required – both in large series and as individual items.
FHR – The Right Partner at Your Side
Shaping the future together – with reliable and high-quality coating solutions from FHR:
- Industry-leading quality: Our vacuum coating systems are designed for maximum precision and durability.
- Customized solutions: We offer individual solutions for your coating project that meet your specific requirements.
- Innovative methods and technologies: With our many years of experience and expertise in vacuum coating, we continue to set new standards.
- Dedicated customer service: Our experienced team is always available to answer your questions and provide you with support in your projects.
Discover the diverse range of possibilities with our vacuum coating technology, and place your trust in FHR as your reliable partner for outstanding coating solutions. Please feel free to get in touch with us to find out more and realize your projects together.
Your Contact Person
Do you have any questions?
Would you like to know more about our vacuum coating systems? Our Director of Product Management, Sven Häberlein, will be happy to help you. Give us a call or write us a message.